I have modified partition sizes, maybe it'a a reason why I can't flash it?
(I have used flash_all_except_storage.sh script)
soc-id: 109
sending 'tz' (196 KB)...
OKAY [ 0.019s]
writing 'tz'...
OKAY [ 0.034s]
finished. total time: 0.053s
sending 'sbl1' (82 KB)...
OKAY [ 0.010s]
writing...